JPH0244326U - - Google Patents
Info
- Publication number
- JPH0244326U JPH0244326U JP12304188U JP12304188U JPH0244326U JP H0244326 U JPH0244326 U JP H0244326U JP 12304188 U JP12304188 U JP 12304188U JP 12304188 U JP12304188 U JP 12304188U JP H0244326 U JPH0244326 U JP H0244326U
- Authority
- JP
- Japan
- Prior art keywords
- gas injection
- electrode
- magnetic field
- chamber
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304188U JPH0244326U (en]) | 1988-09-19 | 1988-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304188U JPH0244326U (en]) | 1988-09-19 | 1988-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0244326U true JPH0244326U (en]) | 1990-03-27 |
Family
ID=31371533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12304188U Pending JPH0244326U (en]) | 1988-09-19 | 1988-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244326U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6094725A (ja) * | 1983-10-28 | 1985-05-27 | Hitachi Ltd | ドライエツチング装置 |
| JPS61226925A (ja) * | 1985-04-01 | 1986-10-08 | Anelva Corp | 放電反応装置 |
| JPS62299031A (ja) * | 1986-06-18 | 1987-12-26 | Nec Corp | 平行平板型エツチング装置の電極構造 |
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1988
- 1988-09-19 JP JP12304188U patent/JPH0244326U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6094725A (ja) * | 1983-10-28 | 1985-05-27 | Hitachi Ltd | ドライエツチング装置 |
| JPS61226925A (ja) * | 1985-04-01 | 1986-10-08 | Anelva Corp | 放電反応装置 |
| JPS62299031A (ja) * | 1986-06-18 | 1987-12-26 | Nec Corp | 平行平板型エツチング装置の電極構造 |